Energy	Sputtering Yield at 40 K	Error at 40 K	Sputtering Yield at 80 K	Error at 80 K	Sputtering Yield at 100 K	Error at 100 K	Sputtering Yield at 120 K	Error at 120 K
keV	O2 ion^-1	(+ / - O2 ion^-1)	O2 ion^-1	(+ / - O2 ion^-1)	O2 ion^-1	(+ / - O2 ion^-1)	O2 ion^-1	(+ / - O2 ion^-1)
0.5	0.365128933	0.0135	0.382571899	0.0187	0.322028393	0.123	0.64993968	0.114
0.75	0.577000845	0.0209	0.577514212	0.0265	0.611089645	0.183	0.910083648	0.189
1	0.650680582	0.0211	0.624600988	0.0209	1.077789042	0.0962	1.060830439	0.16
2	1.137033527	0.0249	1.147570075	0.044	1.664895471	0.225	2.30639265	0.25
3	1.555665425	0.037	1.460371753	0.0208	1.973711816	0.114	3.151050743	0.199
4	2.008733529	0.0463	2.046347037	0.0546	2.201062525	0.121	3.908575732	0.18
5	2.368416047	0.0253	2.447621272	0.342	3.353202343	0.356	5.526301879	0.439
